■ High Voltage Power Supply for Electrostatic Chuck
What is ESC?
When handling silicon wafers for semiconductor devices or glass substrates for liquid crystal panels, it is necessary to adsorb and fix these items within the vacuum chamber of the equipment. The device that generates and controls this adhesive force (the amount of charge appearing on the plate surface) is called a "high voltage power supply (ESC: Electric Static Chuck)."
Advantages of P.R.A. ESC Power Supply
Most high voltage power supplies for ESC used in semiconductor manufacturing equipment are produced overseas, leading to issues related to technical applications and after-support. At P.R.A., we address these issues by designing and developing custom specifications from the design and circuit board stage, resulting in an ESC power supply that achieves improvements, low cost, short delivery times, and long lifespan. For detailed information and reference specifications, please refer to the link on our website: http://www.pra.jp/product/esc
* For quotes or inquiries, please contact us directly at the phone number below or through our website link.
047-369-3389
http://www.pra.jp/contact
【Lineup (Excerpt)】
■ PHV-0110
■ PHV-0110B
■ PHV-0205
■ PHV-0110CT
■ PHV-0205CT
■ PHV-0303CT
*For details, please refer to the attached PDF and feel free to contact us directly.
047-369-3389
It is widely used as a method to fix silicon wafers in semiconductor manufacturing processes (PVD, CVD, ETCH).
■ High Voltage Power Supply for Electrostatic Chuck
What is ESC?
When handling silicon wafers for semiconductor devices or glass substrates for liquid crystal panels, it is necessary to adsorb and fix these items within the vacuum chamber of the equipment. The device that generates and controls this adhesive force (the amount of charge appearing on the plate surface) is called a "high voltage power supply (ESC: Electric Static Chuck)."
Advantages of P.R.A. ESC Power Supply
Most high voltage power supplies for ESC used in semiconductor manufacturing equipment are produced overseas, leading to issues related to technical applications and after-support. At P.R.A., we address these issues by designing and developing custom specifications from the design and circuit board stage, resulting in an ESC power supply that achieves improvements, low cost, short delivery times, and long lifespan. For detailed information and reference specifications, please refer to the link on our website: http://www.pra.jp/product/esc
* For quotes or inquiries, please contact us directly at the phone number below or through our website link.
047-369-3389
http://www.pra.jp/contact
主要取引先
代表製品
ESC Power Supply-2
概要
Bipolar ±750 V 6.5 mA output capability
*For details, please refer to the attached PDF and feel free to contact us directly at 047-369-3389.
用途/実績例
It is widely used as a method to secure silicon wafers in the semiconductor manufacturing process (PVD, CVD, ETCH).
ESC Power Supply-1 (PHV Series)
概要
【Lineup (Excerpt)】
■ PHV-0110
■ PHV-0110B
■ PHV-0205
■ PHV-0110CT
■ PHV-0205CT
■ PHV-0303CT
*For details, please refer to the attached PDF and feel free to contact us directly.
047-369-3389
用途/実績例
It is widely used as a method to fix silicon wafers in semiconductor manufacturing processes (PVD, CVD, ETCH).